Link:

https://doi.org/10.1142/S0219581X21500253

Publisher:

International Journal of Nanoscience

Abstract:

Noble metal nanoparticles (NPs) have unique optical, electronic and catalytic properties. Domelike gold (Au) NPs having a size as small as 16 nm and a high density of 1011 cm2 were prepared by very high frequency (VHF) hydrogen (H2
Þ plasma-assisted radio frequency magnetron sputtering (RFMS) technique. The in°uence of RF power and sputtering time on the morphology and structure of islands-like Au nanostructures (NSs) were determined. Besides, optimum sputtering sample (OSS) was treated by VHF H2 plasma technique to fabricate dense Au NPs with great uniformity. Prepared samples were studied by atomic force microscope (AFM), energy dispersive X-ray spectroscopy (EDX) and high-resolution transmission electron microscope (HR-TEM). AFM images of the sputtering samples show a good density of islandslike
Au NSs ( 1010 cm2Þ with relatively homogeneous distribution. VHF H2 plasma treatment dependent alterations in the surface morphology of the OSS (shape, size, distribution, number density and average surface roughness) were clearly manifested in the AFM images. EDX spectra disclosed prominent Au peaks highly sensitive to the H2 plasma treatment. Our novel fabrication method may contribute to the development of Au NPs based nanodevices.