AIP Conference Proceedings


The deposition processes of the ZnO films have been conducted in this paper. The Q-switched Nd:YAG laser of 10 ns duration and 900 mJ of energy was utilized to perform the deposition process of ZnO\glass heterojunction. At different oxygen pressure, the structural properties, and the morphological properties of the deposited samples have been tested. Under 300 °C heating treatment, and different oxygen pressure the results recorded an a higher crystenality with the pressures of oxygen